Sensofar Metrology

The Sensofar 3D optical profilers are designed for some of the toughest surface metrology challenges. The systems combine four technologies for surface measurement.

1. Confocal Microscopes measure the surface height of smooth to very rough surfaces.

2. Focus Variation measures the shape of large rough surfaces.

3. Interferometry is used in applications with very smooth to rough surfaces.

4. Spectroscopic Reflectometry measures thickness quickly and accurately in a non-destructive way. 

S wide

The S wide is a large area 3D profiler system designed to rapidly measure large sample areas up to 300 x 300 mm. It provides all the benefits of a digital microscope integrated into a high resolution measuring system. It is extremely easy to use with one single button acquisition. This system features sub-micron height repeatability over the entire extended area and one shot height measurement up to 40 mm without Z scanning. The S wide's bi-telecentic lenses have very low field distortion and can generate form deviation from 3D CAD models.

S neox

The new S neox optical profilometer outperforms existing optical 3D profiling microscopes in terms of performance, functionality, efficiency, and design - providing Sensofar with a class-leading areal measurement system. The S neox provides three technologies: Confocal, Interferometric and Active Illumination Focus Variation. These techniques provide surface topographies obtained with height resolutions at the nanometer level. SensoMATCH and SensoCOMP software provide an additional level of confidence when analyzing and comparing surfaces with tool marks. SensoVIEW can be used for critical dimensions measurements such as depth and diameter of firing pin impression.
S neox Five Axis
The S neox Five Axis 3D optical profiler combines a high-accuracy rotational module with the advanced inspection and analysis capabilities of the S neox which enables automatic 3D surface measurements at defined positions which can be combined to create a complete 3D volumetric measurement. It is able to measure a sample at different perspectives generating a group of individual measurements. The SensoFIVE software merges all of the surfaces providing a sample surface with high accuracy by using the stacked image information of each single surface measurement.